Hall Ticket No Question Paper Code: BCC210
INSTITUTE OF AERONAUTICAL ENGINEERING
(Autonomous)
M.Tech II Semester End Examinations(Supplementary) Jannuary, 2019
Regulation: IARE R16
Design for Manufacturing MEMS and Micro Systems
Time: 3 Hours (CAD/CAM) Max Marks: 70
Answer ONE Question from each Unit
All Questions Carry Equal Marks
All parts of the question must be answered in one place only
UNIT I
1. Describe the construction and working of a microaccelerometer with a neat diagram.
What is microfluidics? Write the various applications of microfluidics. Explain any two of
microfluidics.
2. Describe the concept of miniaturisation in microsystems with an example.
What is MEMS? Explain elaborately the applications of MEMS.
UNIT II
3. What is doping in semiconductor? Mention its need. Explain different dopants with their effects
in conduction mechanism.
Describe the construction and working of a fuel cell with a neat diagram.
4. What is ionisation and explain the concept of ionisation with suitable examples.
Elaborate the molecular theory of matter with neat diagrams. Write the applications of molecular
theory of matter.
UNIT III
5. Explain stress analysis on thin plate bending.
Describe normal stress and shear stress and discuss the various stresses induced in thin films.

6. Choose and justify a suitable geometric shape of a diaphragm for a pressure sensor.
"Finite element method is a powerful tool in stress analysis", Justify.
UNIT IV
7. Discuss the process of heat conduction in multilayered thin films and the methods to enhance
the energy transfer.
What are the modes of heat transfer? Explain them between solids and fluids.
8. Describe the conceptual design of a silicon die to fabricate a micro pressure sensor.
What are the properties of fluids? Compare and contrast fluids in macro and micro scale.
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UNIT V
9. What is photolithography? Explain the concept of photolithography with applications.

List any four active substrate materials. Explain in detail any three active substrate materials.

10. List the types of chemical vapour deposition of a substrate. Describe any one process.
"Substrates and Wafers are very usefull in fabrication of MEMS" Justify the statement with its
applications and describe with neat sketches.
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